A study of the effect of synchrotron radiation exposure on the thermophysical parameters of the PMMA X-ray resist

被引：4
|
作者：
Gentselev, A. N. [1 ]
Gol'denberg, B. G. [1 ]
Petrova, E. V. [1 ]
Pindyurin, V. F. [1 ]
Kozlov, A. S. [2 ]
机构：
[1] Russian Acad Sci, Siberian Branch, Budker Inst Nucl Phys, Novosibirsk 630090, Russia
[2] Russian Acad Sci, Siberian Branch, Inst Chem Kinet & Combust, Novosibirsk 630090, Russia
来源：
JOURNAL OF SURFACE INVESTIGATION | 2012年 / 6卷 / 01期
基金：
俄罗斯基础研究基金会;
关键词：
10;
D O I：
10.1134/S1027451012010089
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Differential scanning calorimetry and thermogravimetric analysis results for polymethyl methacrylate (PMMA, monomer with the atomic formula C5H8O2) samples, extensively used as an X-ray resist, are presented. The size distribution of aerosol particles formed by PMMA sample ablation under terrahertz radiation is obtained. The size dependence of the coil-like macromolecules of irradiated PMMA on the exposure dose is found experimentally, and a descriptive model is proposed that is well consistent with the characteristic curve. The processes occurring during irradiation of PMMA are explained (at the qualitative level), and recommendations on intensive SR irradiation of PMMA are given.
引用
收藏
页码：12 / 18
页数：7
相关论文
共 50 条
  • [21] X-RAY OPTICS FOR SYNCHROTRON RADIATION
    MALGRANGE, C
    ACTA PHYSICA POLONICA A, 1992, 82 (01) : 13 - 32
  • [22] X-RAY INTERFEROMETRY WITH SYNCHROTRON RADIATION
    BONSE, U
    MATERLIK, G
    ACTA CRYSTALLOGRAPHICA SECTION A, 1975, 31 : S232 - S232
  • [23] X-RAY OPTICS FOR SYNCHROTRON RADIATION
    FREUND, AK
    SYNCHROTRON RADIATION IN STRUCTURAL BIOLOGY, 1989, 51 : 255 - 292
  • [24] X-ray microscopy with synchrotron radiation
    Chris Jacobsen
    Janos Kirz
    Nature Structural Biology, 1998, 5 : 650 - 653
  • [25] X-ray microscopy with synchrotron radiation
    Jacobsen, C
    Kirz, J
    NATURE STRUCTURAL BIOLOGY, 1998, 5 (Suppl 8) : 650 - 653
  • [26] Effect of helium gas pressure on X-ray mask heating during synchrotron radiation exposure
    Chiba, Akira, 1600, JJAP, Minato-ku, Japan (34):
  • [27] Anomalous X-ray diffraction with soft X-ray synchrotron radiation
    Carpentier, P
    Berthet-Colominas, C
    Capitan, M
    Chesne, ML
    Fanchon, E
    Lequien, S
    Stuhrmann, H
    Thiaudière, D
    Vicat, J
    Zielinski, P
    Kahn, R
    CELLULAR AND MOLECULAR BIOLOGY, 2000, 46 (05) : 915 - 935
  • [28] Study on synchrotron radiation soft X-ray lithography technology
    Sun, Baoyin
    Chen, Mengzhen
    Weixi Jiagong Jishu/Microfabrication Technology, 1993, (04): : 23 - 28
  • [29] Synchrotron radiation X-ray microdiffraction study of Cu interconnects
    Zhang, X
    Solak, H
    Cerrina, F
    Lai, B
    Cai, Z
    Ilinski, P
    Legnini, D
    Rodrigues, W
    APPLICATIONS OF SYNCHROTRON RADIATION TECHNIQUES TO MATERIALS SCIENCE V, 2000, 590 : 259 - 264
  • [30] Experimental study of X-ray induced dose enhancement effect using synchrotron radiation
    Guo, HX
    Chen, YS
    Zhang, YM
    Zhou, H
    Han, FB
    Guan, Y
    Gong, JC
    HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION, 2001, 25 : 1 - 6
12345