A study of the effect of synchrotron radiation exposure on the thermophysical parameters of the PMMA X-ray resist

被引：4
|
作者：
Gentselev, A. N. [1 ]
Gol'denberg, B. G. [1 ]
Petrova, E. V. [1 ]
Pindyurin, V. F. [1 ]
Kozlov, A. S. [2 ]
机构：
[1] Russian Acad Sci, Siberian Branch, Budker Inst Nucl Phys, Novosibirsk 630090, Russia
[2] Russian Acad Sci, Siberian Branch, Inst Chem Kinet & Combust, Novosibirsk 630090, Russia
来源：
JOURNAL OF SURFACE INVESTIGATION | 2012年 / 6卷 / 01期
基金：
俄罗斯基础研究基金会;
关键词：
10;
D O I：
10.1134/S1027451012010089
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Differential scanning calorimetry and thermogravimetric analysis results for polymethyl methacrylate (PMMA, monomer with the atomic formula C5H8O2) samples, extensively used as an X-ray resist, are presented. The size distribution of aerosol particles formed by PMMA sample ablation under terrahertz radiation is obtained. The size dependence of the coil-like macromolecules of irradiated PMMA on the exposure dose is found experimentally, and a descriptive model is proposed that is well consistent with the characteristic curve. The processes occurring during irradiation of PMMA are explained (at the qualitative level), and recommendations on intensive SR irradiation of PMMA are given.
引用
收藏
页码：12 / 18
页数：7
相关论文
共 50 条
  • [1] A study of the effect of synchrotron radiation exposure on the thermophysical parameters of the PMMA X-ray resist
    A. N. Gentselev
    B. G. Gol’denberg
    E. V. Petrova
    V. F. Pindyurin
    A. S. Kozlov
    Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2012, 6 : 12 - 18
  • [2] X-RAY RESIST CHARACTERIZATION WITH MONOCHROMATIC SYNCHROTRON RADIATION
    JAEGER, RP
    PIANETTA, P
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 471 : 121 - 126
  • [3] Synchrotron radiation X-ray photoacoustic effect
    Huang, YY
    Xian, DC
    PROGRESS IN NATURAL SCIENCE, 1996, 6 : S763 - S766
  • [4] Synchrotron radiation X-ray photoacoustic effect
    Beijing Synchrotron Radiation Laboratory , Institute of High Energy Physics, Chinese Academy of Sciences, P.O.Box 918, Beijing 100039, China
    Prog Nat Sci, SPEC. ISS. (S763-S766):
  • [5] Synchrotron radiation X-ray photoacoustic effect
    Huang, YY
    Xian, DC
    9TH INTERNATIONAL CONFERENCE ON PHOTOACOUSTIC AND PHOTOTHERMAL PHENOMENA, CONFERENCE DIGEST, 1996, : 558 - 559
  • [6] Investigation on resist development rate model for synchrotron radiation X-ray lithography
    谢常青
    陈梦真
    王玉玲
    孙宝银
    周生辉
    朱樟震
    Chinese Science Bulletin, 1995, (10) : 861 - 864
  • [7] Development rate of PMMA exposed to synchrotron x-ray radiation for LIGA applications
    McNamara, Shamus
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (01)
  • [8] Density effect for the X-ray synchrotron radiation in a medium
    Grichine, VM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 436 (03): : 445 - 448
  • [9] Density effect for the X-ray synchrotron radiation in a medium
    Grichine, V.M.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1999, 436 (03): : 445 - 448
  • [10] Study of X-ray interference using synchrotron radiation
    Jiang, JH
    Han, Y
    Wang, ZG
    Tian, YL
    Wang, GL
    Wang, L
    Zhao, Y
    Cao, M
    Li, DC
    HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION, 1998, 22 (08): : 763 - 767
12345