AN ALN RESONANT MICROCANTILEVER HUMIDITY SENSOR BY ACTIVATING SPECIFIC SETS OF TOP ELECTRODES BASED ON GRAPHENE OXIDE

被引：0
|
作者：
Li, Dongsheng [1 ]
Le, Xianhao [1 ]
Pang, Jintao [1 ]
Xie, Jin [1 ]
机构：
[1] Zhejiang Univ, Sate Key Lab Fluid Power & Mechatron Syst, Hangzhou, Peoples R China
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
基金：
中国国家自然科学基金;
关键词：
AlN piezoelectric cantilever; humidity sensor; graphene oxide; area separating; electrodes group; CANTILEVER SENSORS; SENSITIVITY;
D O I：
10.1109/transducers.2019.8808713
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The piezoelectric resonant cantilever device is one of the most promising real-time sensing platform. This paper presents an AlN microcantilever humidity sensor based on graphene oxide (GO), We separate the top electrode and sensing area to prevent top electrode and GO from interacting with each other. We have reduced the dimensions of the cantilever electrode area to improve mass sensitivity (Delta f/Delta m) while keep sensing area unchanged. The top electrode is divided into different groups and we improve the quality factor and signal strength of particular mode by activating specific top electrodes. The sensitivity is increased similar to 1kHz/10%RH when the relative humidity is greater than 80%RH. Moreover, excellent short response (<10s) and recovery time are obtained.
引用
收藏
页码：1337 / 1340
页数：4
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