AN ALN RESONANT MICROCANTILEVER HUMIDITY SENSOR BY ACTIVATING SPECIFIC SETS OF TOP ELECTRODES BASED ON GRAPHENE OXIDE

The piezoelectric resonant cantilever device is one of the most promising real-time sensing platform. This paper presents an AlN microcantilever humidity sensor based on graphene oxide (GO), We separate the top electrode and sensing area to prevent top electrode and GO from interacting with each other. We have reduced the dimensions of the cantilever electrode area to improve mass sensitivity (Delta f/Delta m) while keep sensing area unchanged. The top electrode is divided into different groups and we improve the quality factor and signal strength of particular mode by activating specific top electrodes. The sensitivity is increased similar to 1kHz/10%RH when the relative humidity is greater than 80%RH. Moreover, excellent short response (<10s) and recovery time are obtained.