共 50 条
- [32] Development of Xe-filled capillary discharge extreme ultraviolet radiation source for semiconductor lithography EMERGING LITHOGRAPHIC TECHNOLOGIES VII, PTS 1 AND 2, 2003, 5037 : 767 - 775
- [34] Effect of a fiber-capillary structure on nanosecond laser pulse propulsion APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2018, 124 (01):
- [39] Study on ejection mechanism of copper film induced by nanosecond laser Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2019, 48 (02):
- [40] Nanoparticles induced by nanosecond extreme ultraviolet laser at 46.9 nm assisted by single-layer graphene OPTICS AND LASER TECHNOLOGY, 2022, 156