Process check time reduction by the application of an in-line thin film thickness measurement tool

被引：0
|
作者：
Murata, K [1 ]
Saeki, K [1 ]
机构：
[1] NEC Fabserve Ltd, Sagamihara, Kanagawa, Japan
来源：
ISSM 2005: IEEE International Symposium on Semiconductor Manufacturing, Conference Proceedings | 2005年
关键词：
D O I：
10.1109/ISSM.2005.1513362
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Efficiency improvement of productivity is required for the semiconductor fabrication line. It is very effective to reduce the PC(Process Check) time for efficiency improvement of productivity. To reduce PC time, we evaluated the in-line thin film thickness measurement tool. The result of the application of the inline thin film thickness measurement tool, we succeeded to reduce RESIST and BARC film thickness inspection time dramatically as compared with the conventional film thickness inspection time, and proved that the investment efficiency of RESIST and BARC film thickness control was improved.
引用
收藏
页码：299 / 302
页数：4
相关论文
共 50 条
  • [21] Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors
    Biswas, A.
    Sampathkumar, R.
    Kumar, Ajaya
    Bhattacharyya, D.
    Sahoo, N. K.
    Lagoo, K. D.
    Veerapur, R. D.
    Padmanabhan, M.
    Puri, R. K.
    Bhattacharya, Debarati
    Singh, Surendra
    Basu, S.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (12):
  • [22] On-line oil film thickness measurement
    AMEPA GmbH, Aachen, Germany
    不详
    Iron Steel Technol., 2008, 1 (75-81):
  • [23] Using in-line Film Measurement as a Proxy for Device Matching to Speed up Process Change Qualification
    Yu, Chienfan
    Van Roijen, Raymond
    Shah, Shailesh
    Woodard, Eric
    Ayala, Javier
    Sziklas, Edward
    2014 25TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2014, : 245 - 247
  • [24] Experimental design of a film flow cleaning rig equipped with in-line process analytical technology (PAT) tool for real-time monitoring
    Steiner-Browne, Marina
    Aramouni, Nicolas Abdel Karim
    Mouras, Rabah
    HELIYON, 2024, 10 (15)
  • [25] Multivariant measurement for thin film adhesion as a function of temperature and thin film thickness
    Chiang, MYM
    Song, R
    Karim, A
    Amis, EJ
    NANOTECH 2003, VOL 3, 2003, : 254 - 257
  • [26] MEASUREMENT OF FILM THICKNESS OF THIN-FILM RESISTANCE THERMOMETERS
    MCCAA, DJ
    AIAA JOURNAL, 1968, 6 (04) : 747 - &
  • [27] A NEW METHOD FOR MEASURING THE FILM THICKNESS OF MIXED LUBRICATION IN-LINE CONTACTS
    ZOU, QA
    KONG, FR
    WEN, SZ
    TRIBOLOGY TRANSACTIONS, 1995, 38 (04) : 869 - 874
  • [28] An in-line optical fiber refractometer with porous thin film coating
    Lee, Dongwen
    Yang, Minghong
    Qi, Chongjie
    Dai, Jixiang
    Wen, Xiaoyam
    Xiea, Weijing
    SENSORS AND ACTUATORS B-CHEMICAL, 2015, 209 : 602 - 605
  • [29] THIN-FILM MONITORING WITH ELLIPSOMETRY IN IN-LINE PROCESSING EQUIPMENT
    HAYASHI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (11): : 2514 - 2518
  • [30] Process-integrable in-line measurement of the shrinkage of sealants
    Heine, Julian
    Amkreutz, Marc
    Schlag, Mareike
    Adhaesion Kleben und Dichten, 2021, 65 (12): : 34 - 37
12345