Coupled micromechanical resonator for mass detection

被引：0
|
作者：
Yu, Hong [1 ]
Wang, Min [1 ]
Mao, Shihan [1 ]
Chen, Ying [1 ]
Lei, Shuangying [1 ]
机构：
[1] Southeast Univ, Key Lab MEMS, Minist Educ, Nanjing 210096, Jiangsu, Peoples R China
来源：
MODERN PHYSICS LETTERS B | 2022年 / 36卷 / 06期
基金：
中国国家自然科学基金;
关键词：
Coupled resonators; doubly-clamped beams; asymmetric mode; resonant frequency; mass detection; MICROCANTILEVER;
D O I：
10.1142/S0217984921506016
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A resonator composed of two coupled doubly-clamped beams is fabricated and used as a mass sensor. Five mass blocks made of IP-L780 photoresist are printed on each resonator beam by 3D microprinting technology as mass loading. The minimum mass which the sensor can detect is as low as 10 ng. The experimental results show that the asymmetric resonant mode of this resonator has a higher Q factor than the symmetric mode when doing mass detection. The responsivity of the coupled resonator for the mass sensing reaches 58.5 Hz/ng.
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页数：9
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