Additive Manufacturing of Ferroelectric-Oxide Thin-Film Multilayer Devices

被引:11
|
作者
Matavz, Aleksander [1 ,2 ]
Bencan, Andreja [1 ,2 ]
Kovac, Janez [1 ,2 ]
Chung, Ching-Chang [3 ]
Jones, Jacob L. [4 ]
Trolier-McKinstry, Susan [5 ,6 ]
Malic, Barbara [1 ,2 ]
Bobnar, Vid [1 ,2 ]
机构
[1] Jozef Stefan Inst, Jamova Cesta 39, SI-1000 Ljubljana, Slovenia
[2] Jozef Stefan Int Postgrad Sch, Jamova Cesta 39, SI-1000 Ljubljana, Slovenia
[3] North Carolina State Univ, Analyt Instrumentat Facil, Raleigh, NC 27695 USA
[4] North Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[5] Penn State Univ, Dept Mat Sci & Engn, State Coll, PA 16802 USA
[6] Penn State Univ, Mat Res Inst, State Coll, PA 16802 USA
基金
美国国家科学基金会;
关键词
inkjet printing; printed electronics; multilayer capacitors; MEMS; ferroelectric films; CAPACITOR;
D O I
10.1021/acsami.9b17912
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Additive manufacturing has dramatically transformed the design and fabrication of advanced objects. Printed electronics-an additive thin-film processing technology-aims to realize low-cost, large-area electronics, and fabrication of devices with highly customized architectures. Recent advances in printing technology have led to several innovative applications; however, layer-on-layer deposition persists as a challenging issue. Here, the additive manufacturing of functional oxide devices by inkjet printing is presented. Two conditions appear critical for successful layer-on-layer printing: (i) preservation of stable surface properties and (ii) suppression of the material accumulation at the edges of a feature upon drying. The former condition was satisfied by introducing a surface modification layer of a polymer with nanotextured topography, and the latter was satisfied by designing the solvent composition of the ink. The developed process is highly efficient and enables conformal stacking of functional oxide layers according to the user-defined geometry, sequence arrangement, and layer thickness. To prove the effectiveness of this concept, we demonstrate an additive manufacture of all-oxide ferroelectric multilayer capacitors/transducers. Printed multilayer devices offer a significant increase in the capacitance density and the electromechanical voltage response in comparison to the single-layer devices. Further growth in the number of available functional oxide inks will enable arbitrary device architectures with novel functionalities.
引用
收藏
页码:45155 / 45160
页数:6
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