Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

被引：6

作者：

Zhou, Ping ^{[1
]}

Burge, Jim ^{[1
]}

Zhao, Chunyu ^{[1
]}

机构：

[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA

来源：

INTERFEROMETRY XV: TECHNIQUES AND ANALYSIS | 2010年 / 7790卷

关键词：

CGH; imaging aberration; transfer function; Talbot effect; phase smoothing; edge diffraction;

D O I：

10.1117/12.862427

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.

引用

页数：12