Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors

被引：6
|
作者：
Zhou, Ping [1 ]
Burge, Jim [1 ]
Zhao, Chunyu [1 ]
机构：
[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA
来源：
INTERFEROMETRY XV: TECHNIQUES AND ANALYSIS | 2010年 / 7790卷
关键词：
CGH; imaging aberration; transfer function; Talbot effect; phase smoothing; edge diffraction;
D O I：
10.1117/12.862427
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Aspheric surfaces are measured using standard interferometers coupled with computer generated holograms (CGHs) that compensate the aspheric wavefronts. Such systems can measure complex aspheric shapes with accuracy of a few nanometers. However, the imaging properties of the interferometer-CGH combination can provide limitations for data mapping, resolution, and accuracy. These effects are explored, with an emphasis on the diffraction effects that are unique to interferometry.
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页数：12
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