Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

被引：14
|
作者：
Gokce, Sertan Kutal [1 ]
Holmstrom, Sven [1 ]
Hibert, Cyrille [2 ]
Olcer, Selim [1 ]
Bowman, David [3 ]
Urey, Hakan [1 ]
机构：
[1] Koc Univ, Opt Microsyst Lab, Dept Elect Engn, TR-34450 Istanbul, Turkey
[2] Ecole Polytech Fed Lausanne, Ctr Micronanotechnol, CH-1015 Lausanne, Switzerland
[3] Microvision Inc, Redmond, WA 98052 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 01期
关键词：
Beam steering; comb drive; endoscopic imaging; microelectromechanical systems (MEMS) stage; microlens array (MLA); MICROSCANNER; SCANNER; SYSTEM;
D O I：
10.1109/JMEMS.2010.2090507
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
引用
收藏
页码：15 / 17
页数：3
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