Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

被引：14

作者：

Gokce, Sertan Kutal ^{[1
]}

Holmstrom, Sven ^{[1
]}

Hibert, Cyrille ^{[2
]}

Olcer, Selim ^{[1
]}

Bowman, David ^{[3
]}

Urey, Hakan ^{[1
]}

机构：

[1] Koc Univ, Opt Microsyst Lab, Dept Elect Engn, TR-34450 Istanbul, Turkey

[2] Ecole Polytech Fed Lausanne, Ctr Micronanotechnol, CH-1015 Lausanne, Switzerland

[3] Microvision Inc, Redmond, WA 98052 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 01期

关键词：

Beam steering; comb drive; endoscopic imaging; microelectromechanical systems (MEMS) stage; microlens array (MLA); MICROSCANNER; SCANNER; SYSTEM;

D O I：

10.1109/JMEMS.2010.2090507

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.

引用

页码：15 / 17

页数：3

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