共 50 条
- [32] Low dielectric constant fluorinated polyimides for interlayer dielectric applications LOW-DIELECTRIC CONSTANT MATERIALS III, 1997, 476 : 113 - 119
- [38] Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric MRS Bull, 10 (55-58):
- [39] Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric MRS Bulletin, 1997, 22 : 55 - 58