Advances in micro and nano-scale surface metrology

被引：5
|
作者：
Blunt, L [1 ]
Jiang, X
Scott, PJ
机构：
[1] Univ Huddersfield, Huddersfield HD1 3DH, W Yorkshire, England
[2] Taylor Hobson Ltd, Leicester, Leics, England
来源：
MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI | 2005年 / 295-296卷
关键词：
micro and nano scale; surface characterisation;
D O I：
10.4028/www.scientific.net/KEM.295-296.431
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.
引用
收藏
页码：431 / 436
页数：6
相关论文
共 50 条
  • [41] Nano-scale copper oxidation on leadframe surface
    Siti Rahmah Esa
    Rosiyah Yahya
    Aziz Hassan
    Ghazali Omar
    Ionics, 2017, 23 : 319 - 329
  • [42] Nano-scale copper oxidation on leadframe surface
    Esa, Siti Rahmah
    Yahya, Rosiyah
    Hassan, Aziz
    Omar, Ghazali
    IONICS, 2017, 23 (02) : 319 - 329
  • [43] Bulge test at nano-scale: The surface effects
    Lu, Tongqing
    Chen, Chao
    Zhao, Kejie
    Zhang, Weixu
    Wang, T. J.
    APPLIED PHYSICS LETTERS, 2013, 103 (05)
  • [44] Protein Interactions on Nano-Scale Controlled Surface
    Kim, Hyo Jung
    Ryu, Jae-Chun
    Oh, Soon Jin
    BIOCHIP JOURNAL, 2009, 3 (01) : 71 - 75
  • [45] Nano-scale interactions of fungi with mineral surface
    Bonneville, S.
    Benning, L. G.
    GEOCHIMICA ET COSMOCHIMICA ACTA, 2007, 71 (15) : A108 - A108
  • [46] Atomic force microscope cantilever calibration device for quantified force metrology at micro- or nano-scale regime: the nano force calibrator (NFC)
    Kim, Min-Seok
    Choi, Jae-Hyuk
    Park, Yon-Kyu
    Kim, Jong-Ho
    METROLOGIA, 2006, 43 (05) : 389 - 395
  • [47] Advanced nano-scale metrology for the characterization of ceramic materials in the scanning electron microscope
    Pezzotti, Giuseppe
    Matsutani, Atsuo
    Munisso, Maria Chiara
    Zhu, Wenliang
    Materials Science Forum, 2009, 606 : 93 - 101
  • [48] Present problems in coordinate metrology for nano and micro scale measurements
    Takamasu, Kiyoshi
    MAPAN-JOURNAL OF METROLOGY SOCIETY OF INDIA, 2011, 26 (01): : 3 - 14
  • [49] Present problems in coordinate metrology for nano and micro scale measurements
    Kiyoshi Takamasu
    MAPAN, 2011, 26 : 3 - 14
  • [50] Evaporation characteristics of a hydrophilic surface with micro-scale and/or nano-scale structures fabricated by sandblasting and aluminum anodization
    Kim, Hyungmo
    Kim, Joonwon
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (04)
12345