Ni-Silicide Schottky Barrier Micropyramidal Photodetector Array

被引：1

作者：

Bidney, Grant W. ^{[1
,2
]}

Jin, Boya ^{[1
]}

Deguzman, Lou ^{[1
]}

Duran, Joshua M. ^{[2
]}

Ariyawansa, Gamini ^{[2
]}

Anisimov, Igor ^{[2
]}

Limberopoulos, Nicholaos, I ^{[2
]}

Urbas, Augustine M. ^{[3
]}

Allen, Kenneth W. ^{[4
]}

Gunapala, Sarath D. ^{[5
]}

Astratov, Vasily N. ^{[1
,2
]}

机构：

[1] Univ North Carolina Charlotte, Ctr Optoelect & Opt Commun, Dept Phys & Opt Sci, Charlotte, NC 28223 USA

[2] Air Force Res Lab, Sensors Directorate, Wright Patterson AFB, OH 45433 USA

[3] Air Force Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA

[4] Georgia Inst Technol, Georgia Tech Res Inst, Adv Concepts Lab, Atlanta, GA 30332 USA

[5] CALTECH, Jet Prop Lab, 4800 Oak Grove Dr, Pasadena, CA 91030 USA

来源：

PROCEEDINGS OF THE 2021 IEEE NATIONAL AEROSPACE AND ELECTRONICS CONFERENCE (NAECON) | 2021年

基金：

美国国家航空航天局;

关键词：

infrared photodetectors; Schottky barrier photodetector; light concentrators; PYRAMIDS; TMAH;

D O I：

10.1109/NAECON49338.2021.9696408

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

In attempt to increase the quantum yield of metal/silicide Schottky barrier photodetectors, in this work we fabricated and tested Si micropyramidal arrays which are capable to resonantly trap photons in the photodetector areas. To simplify testing, Ni/silicide Schottky barrier photodetectors were formed on the entire 1.5 x 1.5 mm areas occupied by the micropyramidal arrays. Preliminary testing results revealed potentially stronger photoresponse of micropyramids with narrow tops, but further studies are required to compare the performance of such novel photodetector arrays with different geometrical parameters of micropyramids.

引用

页码：116 / 118

页数：3

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