Closed-loop next generation laser polishing

被引：0

作者：

Rascher, Rolf ^{[1
]}

Vogt, Christian ^{[1
]}

Fahnle, Oliver ^{[2
]}

Kim, DaeWook ^{[3
]}

机构：

[1] Univ Appl Sci, THD, D-94469 Deggendorf, Germany

[2] FISBA AG, Rorschacherstr 268, CH-9016 St Gallen, Switzerland

[3] Univ Arizona, Tucson, AZ USA

来源：

FIFTH EUROPEAN SEMINAR ON PRECISION OPTICS MANUFACTURING | 2018年 / 10829卷

关键词：

D O I：

10.1117/12.2318749

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel fabrication parameter controlling method for laser polishing processes called C-Lasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.

引用

页数：6

共 50 条

[21] GENERATION AND CLOSED-LOOP CONTROL OF INHALATION CHAMBER ATMOSPHERES
BLAIR, D
AMERICAN INDUSTRIAL HYGIENE ASSOCIATION JOURNAL, 1970, 31 (02): : 48 - &
[22] Design of Closed-Loop Control for Generation of Nonlinear Oscillations
Popov, Andrey N.
Kuz'menko, Andrey A.
2017 IEEE II INTERNATIONAL CONFERENCE ON CONTROL IN TECHNICAL SYSTEMS (CTS), 2017, : 199 - 202
[23] GENERATION CONTROL BY SHIFTING EIGENVALUES OF A CLOSED-LOOP SYSTEM
SAHA, N
INDIAN JOURNAL OF TECHNOLOGY, 1981, 19 (02): : 68 - 72
[24] Net flow generation in closed-loop valveless pumping
Manopoulos, Christos
Tsangaris, Sokrates
Mathioulakis, Dimitrios
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2020, 234 (11) : 2126 - 2142
[25] Development of a closed-loop testing method for a next-generation terminal-area automation system
Robinson, JE
Isaacson, DR
PROCEEDINGS OF THE 2002 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 2002, 1-6 : 1325 - 1330
[26] Next generation bioelectronic medicine: making the case for non-invasive closed-loop autonomic neuromodulation
Imanuel Lerman
Yifeng Bu
Rahul Singh
Harold A. Silverman
Anuj Bhardwaj
Alex J. Mann
Alik Widge
Joseph Palin
Christopher Puleo
Hubert Lim
Bioelectronic Medicine, 11 (1)
[27] Laser phase spectroscopy in closed-loop multilevel schemes
Arimondo, Ennio
APPLIED PHYSICS B-LASERS AND OPTICS, 2016, 122 (12):
[28] Laser phase spectroscopy in closed-loop multilevel schemes
Ennio Arimondo
Applied Physics B, 2016, 122
[29] Closed-loop focus control systems for laser welding
Haran, FM
Hand, DP
Peters, C
Jones, JDC
ICALEO'96 - PROCEEDINGS OF THE LASERS AND ELECTRO-OPTICS FOR AUTOMOTIVE MANUFACTURING CONFERENCE, 1996, 82 : 154 - 163
[30] Closed-loop optimization
Capdevila-Cortada, Marcal
NATURE CATALYSIS, 2024, 7 (02) : 114 - 114

← 1 2 3 4 5 →