Design and fabrication of miniaturized six-degree of freedom piezoresistive accelerometer

被引：9
|
作者：
Amarasinghe, R [1 ]
Dao, DV [1 ]
Toriyama, T [1 ]
Sugiyama, S [1 ]
机构：
[1] Ritsumeikan Univ, Tokyo, Japan
来源：
MEMS 2005 Miami: Technical Digest | 2005年
关键词：
D O I：
10.1109/MEMSYS.2005.1453939
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a novel miniaturized piezoresistive six-degree of freedom (6DOF) accelerometer designed and fabricated using bulk micromachining technology. This accelerometer measures three components of linear acceleration and three components of angular acceleration on three orthogonal axes in the frequency bandwidth of 300Hz. The average measured sensitivities of the fabricated sensor for linear accelerations and angular accelerations show a cross-axis sensitivity of < 4%. Comparison of the obtained experimental results and finite element simulation shows good agreement. The sensor is ideal for use in biomechanical research applications such as study of human gesture recognition systems.
引用
收藏
页码：351 / 354
页数：4
相关论文
共 50 条
  • [1] Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer
    Amarasinghe, R
    Dao, DV
    Toriyama, T
    Sugiyama, S
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (09) : 1745 - 1753
  • [2] A silicon micromachined six-degree of freedom piezoresistive accelerometer
    Amarasinghe, R
    Dao, DV
    Toriyama, T
    Sugiyama, S
    PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 852 - 855
  • [3] Design & fabrication of piezoresistive six degree of freedom accelerometer for biomechanical applications
    Amarasinghe, R
    Dao, DV
    Toriyama, T
    Sugiyama, S
    2004 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS, 2004, : 148 - 154
  • [4] Silicon piezoresistive six-degree of freedom force-moment micro sensor
    Dao, DV
    Toriyama, T
    Wells, J
    Sugiyama, S
    SENSORS AND MATERIALS, 2003, 15 (03) : 113 - 135
  • [5] Optimizing design of a force probe with six-degree of freedom
    Hu, SJ
    Mei, T
    Kong, DT
    Zhang, Y
    Sun, F
    MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) - 2003, 2003, : 589 - 595
  • [6] The Design and Analysis of a Six-Degree of Freedom Robotic Arm
    Olwan, Omar
    Matan, Asem
    Abdullah, Mohammad
    Abu-Khalaf, Jumana
    2015 10th International Symposium on Mechatronics and its Applications (ISMA), 2015,
  • [7] Design of Control System for Educational Robot with Six-Degree Freedom
    Gao Hewei
    Li Xingdong
    Wang Yangwei
    2018 11TH INTERNATIONAL WORKSHOP ON HUMAN FRIENDLY ROBOTICS (HFR), 2018, : 85 - +
  • [8] Positional solution of a six-degree of freedom parallel robot
    Jiang, Hong
    Jia, Rong
    Dong, Hongzhi
    Wang, Xiaochun
    Shanghai Jiaotong Daxue Xuebao/Journal of Shanghai Jiaotong University, 2000, 34 (03): : 351 - 353
  • [9] Dynamic six-degree of freedom dose reconstruction during radiotherapy
    Muurholm, C. G.
    Ravkilde, T.
    Skouboe, S.
    Eade, T.
    Nguyen, D.
    Booth, J.
    Keall, P. J.
    Poulsen, P. R.
    RADIOTHERAPY AND ONCOLOGY, 2018, 127 : S72 - S73
  • [10] Micro force-moment sensor with six-degree of freedom
    Dao, DV
    Toriyama, T
    Wells, J
    Sugiyama, S
    MHS2001: PROCEEDINGS OF THE 2001 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 2001, : 93 - 98
12345