Micro force-moment sensor with six-degree of freedom

被引：8
|
作者：
Dao, DV [1 ]
Toriyama, T [1 ]
Wells, J [1 ]
Sugiyama, S [1 ]
机构：
[1] New Energy & Ind Technol Dev Org, Toshima Ku, Tokyo 1706028, Japan
来源：
MHS2001: PROCEEDINGS OF THE 2001 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE | 2001年
关键词：
D O I：
10.1109/MHS.2001.965228
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper describes the design concept, theoretical investigation and fabrication process of a micro multi-axis force-moment sensor utilizing the piezoresistive effect in silicon. The purpose of the sensor development is to measure the force and moment acting on boundary particles in a turbulent liquid flow. The sensor was designed to independently detect 3 components of force and 3 components of moment in three orthogonal directions. Conventional type and four-terminal piezoresistors have been combined in a single sensing chip.
引用
收藏
页码：93 / 98
页数：6
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