Micro force-moment sensor with six-degree of freedom

被引：8

作者：

Dao, DV ^{[1
]}

Toriyama, T ^{[1
]}

Wells, J ^{[1
]}

Sugiyama, S ^{[1
]}

机构：

[1] New Energy & Ind Technol Dev Org, Toshima Ku, Tokyo 1706028, Japan

来源：

MHS2001: PROCEEDINGS OF THE 2001 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE | 2001年

关键词：

D O I：

10.1109/MHS.2001.965228

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper describes the design concept, theoretical investigation and fabrication process of a micro multi-axis force-moment sensor utilizing the piezoresistive effect in silicon. The purpose of the sensor development is to measure the force and moment acting on boundary particles in a turbulent liquid flow. The sensor was designed to independently detect 3 components of force and 3 components of moment in three orthogonal directions. Conventional type and four-terminal piezoresistors have been combined in a single sensing chip.

引用

页码：93 / 98

页数：6

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