Volume determination of a silicon sphere using an improved interferometer with optical frequency tuning

被引：34
|
作者：
Kuramoto, N [1 ]
Fujii, K [1 ]
机构：
[1] NMIJ, Natl Inst Adv Ind Sci & Technol AIST, Tsukuba, Ibaraki 3058563, Japan
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2005年 / 54卷 / 02期
关键词：
Avogadro constant; interferometry; optical frequency tuning; silicon crystal;
D O I：
10.1109/TIM.2005.844918
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In order to obtain accurate volume measurements of 1-kg silicon spheres, improvements have been made to an interferometer equipped with a direct optical frequency tuning system. Diameters of a silicon sphere have been measured by the interferometer with a standard uncertainty of 2.6 nm. Details of the improvements and preliminary results of the volume determination are described.
引用
收藏
页码：868 / 871
页数：4
相关论文
共 50 条
  • [21] Integrated Auxiliary Interferometer for Self-Correction of Nonlinear Tuning in Optical Frequency Domain Reflectometry
    Badar, Mudabbir
    Lu, Ping
    Buric, Michael
    Ohodnicki, Paul, Jr.
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2020, 38 (21) : 6097 - 6103
  • [22] Optical whispering gallery mode resonators: analysing thermo-optic tuning in a silicon sphere
    Azeem, Farhan
    Chaudhry, Muhammad Rehan
    Anwar, Muhammad Sohail
    Khan, Haseeb Ahmad
    Ma, Li
    Khan, Adnan Daud
    JOURNAL OF THE ROYAL SOCIETY OF NEW ZEALAND, 2024,
  • [23] Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer
    Kim, Yangjin
    Sugita, Naohiko
    Mitsuishi, Mamoru
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXX, 2016, 9778
  • [24] Improved optical loss characteristics of PECVD silicon oxynitride films using low frequency plasma
    Naskar, S
    Bower, CA
    Wolter, SD
    Stoner, BR
    Glass, JT
    AMORPHOUS AND NANOCRYSTALLINE SILICON SCIENCE AND TECHNOLOGY-2005, 2005, 862 : 61 - 66
  • [25] OPTICAL TUNING OF A SILICON FABRY-PEROT-INTERFEROMETER BY A PULSED 1.06 MU-M LASER
    EICHLER, HJ
    HERITAGE, JP
    BEISSER, FA
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 1981, 17 (12) : 2351 - 2355
  • [26] Determination of Phase Ambiguity in the Interferometer Using a Three -Frequency GLONASS Signal
    Dmitriev, D. D.
    Fateev, Yu. L.
    Ratushniak, V. N.
    2019 INTERNATIONAL SIBERIAN CONFERENCE ON CONTROL AND COMMUNICATIONS (SIBCON), 2019,
  • [27] Integrated tunable optical interferometer obtained using (111) oriented silicon micromachining
    Cristea, D
    Kusko, M
    Tibeica, C
    Muller, R
    Manea, E
    Syvridis, D
    2003 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2003, : 159 - 162
  • [28] Measuring the Interatomic Distance in a Silicon Crystal Lattice Using an Optical Scanning Interferometer
    Sysoev, E., V
    Latyshev, A., V
    OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING, 2021, 57 (06) : 561 - 568
  • [29] Measuring the Interatomic Distance in a Silicon Crystal Lattice Using an Optical Scanning Interferometer
    E. V. Sysoev
    A. V. Latyshev
    Optoelectronics, Instrumentation and Data Processing, 2021, 57 : 561 - 568
  • [30] Improved Differential Phase Detecting Optical Fiber Interferometer With a Low-Frequency Compensation Scheme
    Wu, Yingjie
    Li, Churui
    Tang, Huang
    Jia, Bo
    Wang, Chao
    IEEE ACCESS, 2022, 10 : 15487 - 15494
12345