共 50 条
- [31] Design and Analysis of Serpentine Based MEMS Accelerometer INTERNATIONAL CONFERENCE ON INVENTIVE RESEARCH IN MATERIAL SCIENCE AND TECHNOLOGY (ICIRMCT 2018), 2018, 1966
- [32] System analysis and design of a micromachined tunneling accelerometer ISTM/2003: 5TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, CONFERENCE PROCEEDINGS, 2003, : 25 - 28
- [34] Analysis and fabrication of a novel MEMS pendulum angular accelerometer with electrostatic actuator feedback Microsystem Technologies, 2013, 19 : 9 - 16
- [35] Analysis and fabrication of a novel MEMS pendulum angular accelerometer with electrostatic actuator feedback MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (01): : 9 - 16
- [36] High resolution space quartz-flexure accelerometer based on capacitive sensing and electrostatic control technology REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (09):
- [38] Modelling and optimisation of intelligent electrostatic comb accelerometer Computer Engineering in Applied Electromagnetism, 2005, : 99 - 104
- [40] CHARACTERISTIC OF AN ELECTROSTATIC FORCE-BALANCE ACCELEROMETER TECHNISCHES MESSEN, 1989, 56 (02): : 93 - 98