Microfabrication of Transition-Edge Sensor Arrays of Microcalorimeters with 163Ho for Direct Neutrino Mass Measurements with HOLMES

被引:4
|
作者
Orlando, A. [1 ,3 ]
Ceriale, V. [2 ]
Ceruti, G. [1 ]
De Gerone, M. [2 ]
Faverzani, M. [1 ,3 ]
Ferri, E. [1 ]
Gallucci, G. [2 ]
Giachero, A. [1 ,3 ]
Nucciotti, A. [1 ,3 ]
Puiu, A. [1 ,3 ]
Schmidt, D. [4 ]
Swetz, D. [4 ]
Ullom, J. [4 ]
机构
[1] INFN Milano Bicocca, Piazza Sci 3, I-20126 Milan, Italy
[2] INFN Genova, Via Dodecaneso 33, I-16146 Genoa, Italy
[3] Univ Milano Bicocca, Piazza Sci 3, I-20126 Milan, Italy
[4] NIST, Boulder, CO USA
基金
欧洲研究理事会;
关键词
Neutrino mass; Microcalorimeters; TES; Microfabrication;
D O I
10.1007/s10909-018-1968-2
中图分类号
O59 [应用物理学];
学科分类号
摘要
HOLMES is aiming at a direct measurement of neutrino mass by performing a calorimetric measurement of the energy released in the decay of Ho-163. In such approach, the Ho-163 source, with the required activity, needs to be embedded in the detector. HOLMES will deploy a large array of transition-edge sensor microcalorimeters with implanted Ho-163 ions. While good progress has been made in optimizing single pixel design and fabrication to achieve the target resolution, a major challenge is the fabrication of arrays of such microcalorimeters with the required amount of Ho-163 ions embedded in the detectors absorber. We describe the multi-step microfabrication process implemented to produce the detector arrays for HOLMES. One crucial part of such process is the ability to perform co-deposition of gold during the Ho-163 implantation process on the detectors absorber. We describe the UHV target chamber, with integrated gold deposition system, we have built to achieve this goal.
引用
收藏
页码:771 / 776
页数:6
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