The Investigation of Three Types of Comb-Drive Actuator for MEMS Inclinometer

被引：0
|
作者：
Aung, Kyaw Myo [1 ]
Simonov, Boris M. [1 ]
Kalugin, Victor V. [1 ]
Linn, Kyaw Zin [1 ]
机构：
[1] Natl Res Natl Res Univ Elect Technol MIET, Dept Microelect, Moscow 124498, Russia
来源：
PROCEEDINGS OF THE 2018 IEEE CONFERENCE OF RUSSIAN YOUNG RESEARCHERS IN ELECTRICAL AND ELECTRONIC ENGINEERING (EICONRUS) | 2018年
基金：
俄罗斯科学基金会;
关键词：
comb-drive inclinometer; folded beam; ordinary; triangular; curve; displacement; the change of capacitance;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
To improve the sensitivity of the MEMS comb - drive inclinometer three shapes of the comb-drive: ordinary, triangular and curve were investigated. We used typical folded beam for displacement of rotor part. By calculating the results in ANSYS, the change of capacitance in curve shape comb-drive is more than in the other shapes. And the quality factor of curve shape actuator is higher than in other shape actuator. The curve shape comb-drive is more suitable for getting higher sensitivity for comb-drive MEMS inclinometer.
引用
收藏
页码：1743 / 1745
页数：3
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