Extraordinary transmission through a poly-SiC membrane with subwavelength hole arrays

被引：1

作者：

Provine, J. ^{[1
]}

Catrysse, Peter B. ^{[1
]}

Roper, Christopher ^{[2
]}

Maboudian, Roya ^{[2
]}

Fan, Shanhui ^{[1
]}

Howe, Roger T. ^{[1
]}

机构：

[1] Stanford Univ, Dept Elect Engn, 127X Allen CIS Bldg, Stanford, CA 94305 USA

[2] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA

来源：

2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年

关键词：

optical MEMS; plasmonics; silicon carbide; infra red spectroscopy;

D O I：

10.1109/OMEMS.2007.4373888

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the experimental observation of extraordinary transmission (similar to 50% for 25% fill factor) in the infrared through a suspended polycrystalline silicon carbide (poly-SiC) membrane into which is etched a subwavelength hole array. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). Simulation of the mid-infrared transmission is broadly consistent with measurements.

引用

页码：157 / +

页数：2

共 50 条

[31] Extraordinary light transmission through a metal film perforated by a subwavelength hole array
Zyablovskii, A. A.
Pavlov, A. A.
Klimov, V. V.
Pukhov, A. A.
Dorofeenko, A. V.
Vinogradov, A. P.
Lisyanskii, A. A.
JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2017, 125 (02) : 175 - 188
[32] Extraordinary light transmission through a metal film perforated by a subwavelength hole array
A. A. Zyablovskii
A. A. Pavlov
V. V. Klimov
A. A. Pukhov
A. V. Dorofeenko
A. P. Vinogradov
A. A. Lisyanskii
Journal of Experimental and Theoretical Physics, 2017, 125 : 175 - 188
[33] Influence of unsymmetrical periodicity on extraordinary transmission through periodic arrays of subwavelength holes
Ren, Xi-Feng
Guo, Guo-Ping
Huang, Yun-Feng
Wang, Zhi-Wei
Guo, Guang-Can
APPLIED PHYSICS LETTERS, 2007, 90 (16)
[34] Extraordinary optical transmission through a subwavelength composite hole-pillar array
邵伟佳
李为民
许小亮
王会杰
吴以治
郁菁
Chinese Physics B, 2014, (11) : 487 - 492
[35] Control of optical transmission through metals perforated with subwavelength hole arrays
Kim, TJ
Thio, T
Ebbesen, TW
Grupp, DE
Lezec, HJ
OPTICS LETTERS, 1999, 24 (04) : 256 - 258
[36] Optical transmission through subwavelength hole arrays in ultrathin metal films
Braun, Julia
Gompf, Bruno
Weiss, Thomas
Giessen, Harald
Dressel, Martin
Huebner, Uwe
PHYSICAL REVIEW B, 2011, 84 (15)
[37] Extraordinary IR transmission with metallic arrays of subwavelength holes
Coe, JV
Williams, SM
Rodriguez, KR
Teeters-Kennedy, S
Sudnitsyn, A
Hrovat, F
ANALYTICAL CHEMISTRY, 2006, 78 (05) : 1384 - 1390
[38] Enhanced millimeter-wave transmission through subwavelength hole arrays
Beruete, M
Sorolla, M
Campillo, I
Dolado, JS
Martín-Moreno, L
Bravo-Abad, J
García-Vidal, FJ
OPTICS LETTERS, 2004, 29 (21) : 2500 - 2502
[39] Extraordinary terahertz transmission in superconducting subwavelength hole array
Wu, Jingbo
Dai, Hao
Wang, Hao
Jin, Biaobing
Jia, Tao
Zhang, Caihong
Cao, Chunhai
Chen, Jian
Kang, Lin
Xu, Weiwei
Wu, Peiheng
OPTICS EXPRESS, 2011, 19 (02): : 1101 - 1106
[40] Extraordinary transmission of metal films with arrays of subwavelength holes
Coe, James V.
Heer, Joseph M.
Teeters-Kennedy, Shannon
Tian, Hong
Rodriguez, Kenneth R.
ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 2008, 59 : 179 - 202

← 1 2 3 4 5 →