Influence of Nitrogen Partial Pressure on the Microstructure and Properties of TiN Coatings

被引：0
|
作者：
Xie, Shifang [1 ]
Liu, Keming [1 ]
Ke, Peiling [2 ]
Zhang, Dong [2 ]
Wei, Shiyong [1 ]
Wang, Aiying [2 ]
机构：
[1] Jiangxi Acad Sci, Inst Appl Phys, Nanchang 330029, Peoples R China
[2] Ningbo Inst Mat Technol & Engn, Chinese Acad Sci, Ningbo 315201, Peoples R China
来源：
MODERN TECHNOLOGIES IN MATERIALS, MECHANICS AND INTELLIGENT SYSTEMS | 2014年 / 1049卷
基金：
中国国家自然科学基金;
关键词：
Multi-arc ion plating; TiN; Microstructure; Hardness; Cohesion; TITANIUM;
D O I：
10.4028/www.scientific.net/AMR.1049-1050.89
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
TiN coatings were prepared by using multi-arc ion plating technique at different N-2 partial pressures. The surface morphology of the coatings was characterized by using a tabletop scanning electron microscope. The cross-sectional microstructure was investigated by using a field emission scanning electron microscope. The phase composition was evaluated by using an X-Ray diffractometer. The hardness and cohesion were measured by using a nano indentation tester and a scratch instrument, respectively. The results show that the number and size of macro-particles decrease and the compactness of TiN coating increases with the increase of the N-2 partial pressure. The hardness and cohesion of the coating increase gradually with increasing N-2 partial pressures and reach a peak at 0.6 Pa; then the hardness and cohesion are significantly lower at higher N-2 partial pressures.
引用
收藏
页码：89 / +
页数：3
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