共 50 条
- [42] Micro- And Nano-Patterning Using Imprinting Technique INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 368 - 372
- [43] Simultaneous AFM Nano-Patterning and Imaging for Photomask Repair METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXX, 2016, 9778
- [45] Mechanism-dependent resolution for protein micro/nano-patterning ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XVII, PTS 1 AND 2, 2000, 3999 : 472 - 477
- [46] Extreme ultraviolet lasers demonstrate new nano-patterning schemes 2010 23RD ANNUAL MEETING OF THE IEEE PHOTONICS SOCIETY, 2010, : 335 - +