Atomic force microscope investigations of topography, lateral force and electrical properties of metal containing amorphous, hydrogenated carbon thin films

被引：0
|
作者：
Kazimierski, P [1 ]
Lehmberg, H [1 ]
机构：
[1] TH DARMSTADT,INST ANGEW PHYS,D-64289 DARMSTADT,GERMANY
来源：
INTERNATIONAL JOURNAL OF ELECTRONICS | 1996年 / 81卷 / 04期
关键词：
D O I：
10.1080/002072196136643
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Amorphous, hydrogenated carbon thin films have been prepared in an RF supported plasma process including ferrocene as an organometallic. Differences in electrical conductivity and elastic modulus are suggested to be due to a modification of the carbonaceous matrix. For locally resolved measurements of the electrical conductivity, an atomic force microscope, working in the contact mode, has been employed.
引用
收藏
页码：467 / 472
页数：6
相关论文
共 50 条
  • [31] Electrical nanoprobing of semiconducting carbon nanotubes using an atomic force microscope
    Yaish, Y
    Park, JY
    Rosenblatt, S
    Sazonova, V
    Brink, M
    McEuen, PL
    PHYSICAL REVIEW LETTERS, 2004, 92 (04) : 4
  • [32] Relationships between lateral force and viscoelastic properties for amorphous polymer films based on lateral force microscopy
    Won -Ki Lee
    Jeong -Sik Yoon
    Keiji Tanaka
    Noriaki Satomi
    Xiqun Jiang
    Atsushi Takahara
    Chang -Sik Ha
    Tisato Kajiyama
    Polymer Bulletin, 1997, 39 : 369 - 376
  • [33] Relationships between lateral force and viscoelastic properties for amorphous polymer films based on lateral force microscopy
    Lee, WK
    Yoon, JS
    Tanaka, K
    Satomi, N
    Jiang, XQ
    Takahara, A
    Ha, CS
    Kajiyama, T
    POLYMER BULLETIN, 1997, 39 (03) : 369 - 376
  • [34] Electrical cutting and nicking of carbon nanotubes using an atomic force microscope
    Park, JY
    Yaish, Y
    Brink, M
    Rosenblatt, S
    McEuen, PL
    APPLIED PHYSICS LETTERS, 2002, 80 (23) : 4446 - 4448
  • [35] Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip
    Inaba, Masafumi
    Ohara, Kazuyoshi
    Shibuya, Megumi
    Ochiai, Takumi
    Yokoyama, Daisuke
    Norimatsu, Wataru
    Kusunoki, Michiko
    Kawarada, Hiroshi
    JOURNAL OF APPLIED PHYSICS, 2018, 123 (24)
  • [36] CHEMICAL MODIFICATION OF THE ELECTRICAL-PROPERTIES OF THIN-FILMS OF HYDROGENATED AMORPHOUS-CARBON
    MEYERSON, B
    SMITH, FW
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (03): : 330 - 330
  • [37] TRIBOLOGICAL AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING HYDROGENATED CARBON-FILMS
    DIMIGEN, H
    HUBSCH, H
    MEMMING, R
    APPLIED PHYSICS LETTERS, 1987, 50 (16) : 1056 - 1058
  • [38] ATOMIC FORCE AND SCANNING ELECTRON MICROSCOPE INVESTIGATIONS OF NANOCOMPOSITE ANALOGUES OF INTERSTELLAR AMORPHOUS SILICATES
    Weber, I.
    Romstedt, J.
    Al-Badri, Z.
    Grier, D. G.
    Jessberger, E. K.
    METEORITICS & PLANETARY SCIENCE, 2003, 38 (07) : A98 - A98
  • [39] CHARACTERIZATION OF METAL-CONTAINING AMORPHOUS HYDROGENATED CARBON-FILMS
    WANG, M
    SCHMIDT, K
    REICHELT, K
    DIMIGEN, H
    HUBSCH, H
    JOURNAL OF MATERIALS RESEARCH, 1992, 7 (03) : 667 - 676
  • [40] Atomic Force Microscope Investigation on Static Nanomechanical Properties Versus Dynamic Nanotribological Evaluation of Metal–ZrN and ZrN Thin Films
    D. M. Mihut
    S. M. Aouadi
    J. A. Turner
    S. L. Rohde
    Tribology Letters, 2008, 31 : 37 - 45
12345