Atomic force microscope investigations of topography, lateral force and electrical properties of metal containing amorphous, hydrogenated carbon thin films

被引：0
|
作者：
Kazimierski, P [1 ]
Lehmberg, H [1 ]
机构：
[1] TH DARMSTADT,INST ANGEW PHYS,D-64289 DARMSTADT,GERMANY
来源：
INTERNATIONAL JOURNAL OF ELECTRONICS | 1996年 / 81卷 / 04期
关键词：
D O I：
10.1080/002072196136643
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Amorphous, hydrogenated carbon thin films have been prepared in an RF supported plasma process including ferrocene as an organometallic. Differences in electrical conductivity and elastic modulus are suggested to be due to a modification of the carbonaceous matrix. For locally resolved measurements of the electrical conductivity, an atomic force microscope, working in the contact mode, has been employed.
引用
收藏
页码：467 / 472
页数：6
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