Current and future possibilities of non-contact nano machining by combination of laser with scanning probe technology

Nano technology is of increasing interest for future oriented applications and bio technology. For the industrial production of nano components new nano handling systems as well as appropriate nano machining processes will be required. Various nano machining processes based on near field technology - known from Scanning Probe Microscopy (SPM) - have been developed in the past and will be introduced briefly in the following. However, this paper will mainly concentrate on a new laser machining process. FOLANT-process (Focusing of Laserradiation in the Nearfield of a Lip) is characterized by a couple of unique machining features and enables machining down to a few nanometers.