Miniature large range multi-axis force-torque sensor for biomechanical applications

被引：14
|
作者：
Brookhuis, R. A. [1 ]
Sanders, R. G. P. [1 ]
Ma, K. [1 ]
Lammerink, T. S. J. [1 ]
De Boer, M. J. [1 ]
Krijnen, G. J. M. [1 ]
Wiegerink, J. [1 ]
机构：
[1] Univ Twente, MESA Inst Nanotechnol, NL-7522 NB Enschede, Netherlands
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2015年 / 25卷 / 02期
关键词：
force sensor; capacitive; multi-axis; shear force; moment; large range; TACTILE SENSOR; KINEMATICS; MOVEMENTS;
D O I：
10.1088/0960-1317/25/2/025012
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, +/- 30 N in shear direction and a torque range of +/- 25 N mm.
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收藏
页数：16
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