共 50 条
- [22] New solutions to realize complex optical systems by a combination of diffractive and refractive optical components LITHOGRAPHIC AND MICROMACHINING TECHNIQUES FOR OPTICAL COMPONENT FABRICATION II, 2003, 5183 : 47 - 55
- [24] New way to realize miniaturized complex optical systems in high volume MOEMS AND MINIATURIZED SYSTEMS XVII, 2018, 10545
- [25] Techniques to Realize Flexible Optical Terabit per Second Transmission Systems OPTICAL METRO NETWORKS AND SHORT-HAUL SYSTEMS V, 2013, 8646
- [26] Concept for a new approach to realize complex optical systems in high volume OPTIFAB 2017, 2017, 10448
- [27] Pattern dependence optical phase effect on alternating phase shift mask PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY X, 2003, 5130 : 745 - 755
- [29] Reduction of mask induced CD errors by optical proximity correction OPTICAL MICROLITHOGRAPHY XI, 1998, 3334 : 124 - 130
- [30] Optical microlithographic phase-shifting mask technology 17TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR SCIENCE AND NEW TECHNOLOGY, PTS 1 AND 2, 1996, 2778 : 243 - 244