Optimization of Discharge Parameters for a Glow Discharge Emission Spectrograph with Two-dimensional Spatial Resolution

被引:2
|
作者
Zhang, Xinyue [1 ]
Wagatsuma, Kazuaki [1 ]
机构
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Katahira 2-1-1, Sendai, Miyagi 9808577, Japan
关键词
atomic emission spectrometry; glow discharge plasma; three-dimensional imaging; copper tip; RESOLVED OBSERVATION; PLASMA;
D O I
10.2355/isijinternational.ISIJINT-2019-205
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
This paper describes a specified measuring system for glow discharge emission spectrograph, which can provide a spatial/radial distribution of analyte atoms on the sample surface, while the conventional system provides only the information on the elemental distribution in depth direction. For this purpose, a spectrometer system consisting of an image spectrograph and an intensified charge coupled device (ICCD) detector was employed. The delay time and gate width of the ICCD detector was principally selected to improve the spatial resolution of the emitting zone. The objective of this paper was to determine an optimized set of the experimental parameter for better spatial resolution. The best spatial resolution was obtained when the gate width was 1 mu s and the delay time was 60 mu s. Better spatial resolution was obtained at narrower gate width, because the re-emission from the analyte atoms could be observed to a less extent when the observation was conducted more instantly just after start of the pulsed discharge.
引用
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页码:610 / 612
页数:3
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