Nucleation and growth of well-aligned, uniform-sized carbon nanotubes by microwave plasma chemical vapor deposition

The nucleation and growth of carbon nanotubes assisted by microwave plasma on metal surfaces have been observed by transmission electron microscopy. Microwave plasma generated nanoparticles of various sizes on metal surfaces. Initially, the nanoparticles were embedded in an amorphous carbon layer and led to the formation of carbon tube nuclei. At the early stage of growth the carbon tube diameters ranged from 10 to 100 nm. Carbon tubes with diameters of 40-50 nm had a high growth rate in the vertical direction, resulting in the formation of tube arrays. (C) 2001 American Institute of Physics.