Biaxial texture development in the ion beam assisted deposition of magnesium oxide

被引:14
|
作者
Groves, James R. [1 ,2 ]
Hammond, Robert H. [3 ]
Matias, Vladimir [2 ]
DePaula, Raymond F. [2 ]
Stan, Liliana [2 ]
Clemens, Bruce M. [1 ]
机构
[1] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
[2] Los Alamos Natl Lab, Superconduct Technol Ctr, Los Alamos, NM 87545 USA
[3] Stanford Univ, Ceballe Lab Adv Mat, Stanford, CA 94305 USA
关键词
Ion beam assisted deposition; Nucleation and growth; RHEED; Biaxial texture; Magnesium oxide; MGO; NUCLEATION; FILMS;
D O I
10.1016/j.nimb.2011.01.026
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Low-energy ion-beam irradiation (< 1 keV) during the concurrent deposition of cubic oxide materials results in the growth of crystallographically textured thin films. A model system, magnesium oxide (MgO). has been successfully used as a biaxially textured template film for the heteroepitaxial deposition of many materials with texture dependent properties like high temperature superconductors, tunable microwave materials, and ferroelectrics. Here, we present data on the initial nucleation of biaxial crystallographic texture in this model system using an in situ quartz crystal microbalance (QCM) substrate combined with in situ reflected high-energy electron diffraction (RHEED). Correlation of mass uptake with the RHEED images of the growing surface shows that the development of crystallographic biaxial texture in this material system occurs suddenly as the initially polycrystalline MgO films reaches a critical film thickness of 2 nm. This texture continues to improve during subsequent growth. A simple model shows that the effect is not due simply to coverage effects. We use a combination of in situ RHEED and ex situ transmission electron microscopy to further elucidate the mechanism of this sudden texture formation. We present a physical model to describe this behavior and explain the role of ion-to-atom arrival ratio and underlying nucleation surface on texture development. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:28 / 32
页数:5
相关论文
共 50 条
  • [21] Ion beam-assisted deposition of magnesium oxide thin film for PDP applications
    Ide-Ektessabi, A
    Nomura, H
    Yasui, N
    Tsukuda, Y
    SURFACE & COATINGS TECHNOLOGY, 2003, 163 : 728 - 733
  • [22] Investigation of Early Nucleation Events in Magnesium Oxide During Ion Beam Assisted Deposition
    Groves, James R.
    Hammond, Robert H.
    Depaula, Raymond F.
    Clemens, Bruce M.
    ARTIFICIALLY INDUCED GRAIN ALIGNMENT IN THIN FILMS, 2009, 1150 : 37 - +
  • [23] Biaxial alignment of TiN films prepared by ion beam assisted deposition
    Gerlach, JW
    Preckwinkel, U
    Wengenmair, H
    Kraus, T
    Rauschenbach, B
    APPLIED PHYSICS LETTERS, 1996, 68 (17) : 2360 - 2362
  • [24] Microstructure and texture evolution in oxide films prepared by ion-beam assisted laser deposition
    Holzapfel, B
    Betz, V
    Schläfer, D
    Bauer, HD
    Schultz, L
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1999, 9 (02) : 1479 - 1482
  • [25] Texture and epitaxy by ion beam assisted deposition of gallium nitride
    Gerlach, JW
    Schwertberger, R
    Schrupp, D
    Rauschenbach, B
    Neumann, H
    Zeuner, M
    SURFACE & COATINGS TECHNOLOGY, 2000, 128 : 286 - 291
  • [26] In situ biaxial texture analysis of MgO films during growth on amorphous substrates by ion beam-assisted deposition
    Brewer, RT
    Arendt, PN
    Groves, JR
    Atwater, HA
    ENGINEERING THIN FILMS WITH ION BEAMS, NANOSCALE DIAGNOSTICS, AND MOLECULAR MANUFACTURING, 2001, 4468 : 124 - 130
  • [27] Structural and discharge characteristics of magnesium oxide deposited by oxygen-ion-beam-assisted deposition
    Kwon, Sang Jik
    Li, Zhao Hui
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2007, 46 (01): : 217 - 219
  • [28] Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition
    Weber, TP
    Ma, B
    Balachandran, U
    McNallan, M
    THIN SOLID FILMS, 2005, 476 (01) : 79 - 83
  • [29] The development of biaxial alignment in yttria-stabilized zirconia films fabricated by ion beam assisted deposition
    Ressler, KG
    Sonnenberg, N
    Cima, MJ
    JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (01) : 35 - 42
  • [30] Mechanism and processing dependence of biaxial texture development in magnesium oxide thin films grown by inclined-substrate deposition
    Chudzik, MP
    Koritala, RE
    Luo, ZP
    Miller, DJ
    Balachandran, U
    Kannewurf, CR
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2001, 11 (01) : 3469 - 3472