Gallium-doped sol-gel glass waveguides on Si substrates by SC-RTA

被引：2
|
作者：
Schneider, VM [1 ]
Syms, RRA [1 ]
机构：
[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, London SW7 2BT, England
来源：
ELECTRONICS LETTERS | 1998年 / 34卷 / 19期
关键词：
D O I：
10.1049/el:19981238
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The fabrication of silica-on-silicon channel guides by spin-coating and rapid thermal annealing (SC-RTA) of sol-gel glass doped with gallium, germanium and phosphorus oxides is described, and methods of depositing clear, crack-free films are discussed. Low loss is only obtained for lightly-doped guides with controlled process temperatures.
引用
收藏
页码：1849 / 1850
页数：2
相关论文
共 50 条
  • [41] Photoluminescence of erbium-doped silicate sol-gel planar waveguides
    Almeida, RM
    Marques, AC
    Cabeça, R
    Zampedri, L
    Chiasera, A
    Ferrari, M
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2004, 31 (1-3) : 317 - 322
  • [42] Photoluminescence of Erbium-Doped Silicate Sol-Gel Planar Waveguides
    R.M. Almeida
    A.C. Marques
    R. Cabeça
    L. Zampedri
    A. Chiasera
    M. Ferrari
    Journal of Sol-Gel Science and Technology, 2004, 31 : 317 - 322
  • [43] Rare-earth doped sol-gel materials for optical waveguides
    Locher, M
    Romano, V
    Weber, HP
    OPTICS AND LASERS IN ENGINEERING, 2005, 43 (3-5) : 341 - 347
  • [44] IR to visible light conversion in doped sol-gel waveguides.
    Blanc, D
    Boukenter, A
    Ouerdane, Y
    Marques, P
    INTEGRATED OPTIC DEVICES II, 1998, 3278 : 332 - 339
  • [45] Nonlinear optical properties of semiconductor-doped sol-gel waveguides
    Fick, J
    Martucci, A
    Guglielmi, M
    Schell, J
    FIBER AND INTEGRATED OPTICS, 2000, 19 (01) : 43 - 56
  • [46] Stability characteristics of gallium-doped zinc-tin-oxide thin-film transistors fabricated using a sol-gel method
    Jong Hoon Lee
    Chang Hoi Kim
    Hong Seung Kim
    Jae Hoon Park
    Jin Hwa Ryu
    Kyu-Ha Baek
    Lee-Mi Do
    Journal of the Korean Physical Society, 2013, 62 : 1176 - 1182
  • [47] Stability characteristics of gallium-doped zinc-tin-oxide thin-film transistors fabricated using a sol-gel method
    Lee, Jong Hoon
    Kim, Chang Hoi
    Kim, Hong Seung
    Park, Jae Hoon
    Ryu, Jin Hwa
    Baek, Kyu-Ha
    Do, Lee-Mi
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2013, 62 (08) : 1176 - 1182
  • [48] Visualization of surface gelation processes in a doped sol-gel glass
    Puccetti, G
    Leblanc, RM
    ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 1999, 38 (21) : 3235 - 3237
  • [49] EVANESCENT SENSING IN DOPED SOL-GEL GLASS-FILMS
    LEE, JE
    SAAVEDRA, SS
    ANALYTICA CHIMICA ACTA, 1994, 285 (03) : 265 - 269
  • [50] Investigation of a copper doped sol-gel glass for laser applications
    Sawczak, M
    Sliwinski, G
    Grinberg, M
    Kuklinski, B
    11TH INTERNATIONAL SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS, 2001, 4397 : 119 - 123
12345