Gallium-doped sol-gel glass waveguides on Si substrates by SC-RTA

被引：2
|
作者：
Schneider, VM [1 ]
Syms, RRA [1 ]
机构：
[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, London SW7 2BT, England
来源：
ELECTRONICS LETTERS | 1998年 / 34卷 / 19期
关键词：
D O I：
10.1049/el:19981238
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The fabrication of silica-on-silicon channel guides by spin-coating and rapid thermal annealing (SC-RTA) of sol-gel glass doped with gallium, germanium and phosphorus oxides is described, and methods of depositing clear, crack-free films are discussed. Low loss is only obtained for lightly-doped guides with controlled process temperatures.
引用
收藏
页码：1849 / 1850
页数：2
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