Texture of titanium self-aligned silicide (salicide)

被引：6
|
作者：
Wan, WK
Wu, ST
机构：
[1] Dept. of Mat. Sci. and Engineering, National Tsing-Hua University, Hsinchu
来源：
SCRIPTA MATERIALIA | 1996年 / 35卷 / 01期
关键词：
D O I：
10.1016/1359-6462(96)00103-0
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
[No abstract available]
引用
收藏
页码：53 / 58
页数：6
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