Highly sensitive soft optical fiber tactile sensor

被引：11
|
作者：
Xu, Tianzong [1 ]
LI, Lijun [1 ,2 ]
Wang, Yi [1 ]
Ma, Qian [2 ,3 ]
Jia, Congying [2 ]
Shao, Changsheng [2 ]
机构：
[1] Shandong Univ Sci & Technol, Coll Elect Engn & Automat, Qingdao 266590, Peoples R China
[2] Shandong Univ Sci & Technol, Coll Elect & Informat Engn, Qingdao 266590, Peoples R China
[3] Minist Sci & Technol, State Key Lab Min Disaster Prevent & Control Cofou, Qingdao 266590, Peoples R China
来源：
OPTICS EXPRESS | 2022年 / 30卷 / 19期
关键词：
REFRACTIVE-INDEX; PRESSURE SENSOR; FILM;
D O I：
10.1364/OE.467865
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A soft highly sensitive tactile sensor based on an in-fiber interferometer embedded in polydimethylsiloxane (PDMS) structure is studied. Theoretical simulation obtains that the high order sensing modes and PDMS can improve the sensitivity. Experiments show that different order sensing modes, derived by fast Fourier transform (FFT) and inverse FFT methods, present different sensing performance. Corresponding to high order mode, 1.3593 nm/kPa sensitivity and 37 Pa (0.015 N) detection limit is obtained. Meanwhile, it also shows very good stability, reproducibility, and response time. This study not only demonstrates a tactile sensor with high sensitivity but also provides a novel sensing modes analysis method. (c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：34064 / 34076
页数：13
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