Large area high density quantized magnetic disks fabricated using nanoimprint lithography

被引：164
|
作者：
Wu, W [1 ]
Cui, B [1 ]
Sun, XY [1 ]
Zhang, W [1 ]
Zhuang, L [1 ]
Kong, LS [1 ]
Chou, SY [1 ]
机构：
[1] Princeton Univ, Dept Elect Engn, NanoStruct Lab, Princeton, NJ 08544 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 06期
关键词：
D O I：
10.1116/1.590417
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.(2) and good uniformity over an area of 4 cm x 4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.(2) The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy. (C) 1998 American Vacuum Society. [S0734-211X(98)15406-9].
引用
收藏
页码：3825 / 3829
页数：5
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