[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] Fudan Univ, Shanghai Engn Res Ctr Ultra Precis Opt Mfg, Green Photon, Shanghai 200433, Peoples R China
[4] Fudan Univ, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China
[5] Fudan Univ, State Key Lab Surface Phys, Shanghai 200433, Peoples R China
[6] Fudan Univ, Key Lab Micro & Nano Photon Struct, Minist Educ, Shanghai 200433, Peoples R China
[7] Collaborat Innovat Ctr Adv Microstruct, Nanjing 210093, Peoples R China