Electromechanical characterization of screen-printed PZT thick films

被引：1
|
作者：
Walter, V [1 ]
Le Moal, P [1 ]
Delobelle, P [1 ]
Joseph, E [1 ]
机构：
[1] Univ Franche Comte, UMR CNRS 6604, Lab Mecan Appliquee, F-25000 Besancon, France
来源：
FIFTH EUROPEAN CONFERENCE ON SMART STRUCTURES AND MATERIALS | 2000年 / 4073卷
关键词：
PZT; thick films; screen-printing; electromechanical characterization; damping control;
D O I：
10.1117/12.396390
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Thick soft and hard-PZT films have been fabricated on different geometries of Alumina substrates using a screen-printing technique. Three mechanical characterization tests were set up to determine the Young's modulus of the films : dynamic, quasi-static and nanoindentation tests. A Young's modulus around 52+/-7 GPa was calculated. The piezoelectric coefficient d(31) was also investigated and is found to be close to -33pC/N. The fabricated films showed also good performances when used in damping control.
引用
收藏
页码：121 / 128
页数：8
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