Thermomechanical characterization of on-chip buckled dome Fabry-Perot microcavities

被引：19

作者：

Bitarafan, M. H. ^{[1
]}

Ramp, H. ^{[2
]}

Allen, T. W. ^{[1
]}

Potts, C. ^{[1
]}

Rojas, X. ^{[2
]}

MacDonald, A. J. R. ^{[2
]}

Davis, J. P. ^{[2
]}

DeCorby, R. G. ^{[1
]}

机构：

[1] Univ Alberta, ECE Dept, Edmonton, AB T6G 2V4, Canada

[2] Univ Alberta, Dept Phys, Edmonton, AB T6G 2G7, Canada

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 2015年 / 32卷 / 06期

关键词：

BEHAVIOR; FINESSE; ARRAYS; ATOMS;

D O I：

10.1364/JOSAB.32.001214

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on the thermomechanical and thermal tuning properties of curved-mirror Fabry -Perot resonators, fabricated by the guided assembly of circular delamination buckles within a multilayer a-Si/ SiO2 stack. Analytical models for temperature dependence, effective spring constants, and mechanical mode frequencies are described and shown to be in good agreement with experimental results. The cavities exhibit mode volumes as small as similar to 10 lambda(3), reflectance-limited finesse similar to 3 x 10(3), and mechanical resonance frequencies in the MHz range. Monolithic cavity arrays of this type might be of interest for applications in sensing, cavity quantum electrodynamics, and optomechanics. (C) 2015 Optical Society of America

引用

页码：1214 / 1220

页数：7

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