Interface reactions among electrodes, substrates and Pb(Zr,Ti)O3-based films

被引:0
|
作者
Kosec, M [1 ]
Malic, B [1 ]
Holc, J [1 ]
Hrovat, M [1 ]
Mandeljc, M [1 ]
Bencan, A [1 ]
Samardzija, Z [1 ]
Drazic, G [1 ]
机构
[1] Jozef Stefan Inst, Ljubljana 1000, Slovenia
关键词
ferrolectric ceramics; interactions; heterostructrure; films; conductive oxides;
D O I
暂无
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Interactions between (Pb,La)(Zr, Ti)O-3 (PLZT) thin and thick films and silicon or alumina substrates, respectively, were studied. In the case of thin films the lowering of the firing temperature inhibits the formation of secondary phases. For thick films the additional layer of PLZT between the alumina substrate and the Pt electrode improves adhesion within the PLZT thick-film heterostructures. Interactions between conductive oxides which could be used as electrodes instead of noble metals and PZT-based materials are reported.
引用
收藏
页码:51 / 62
页数:12
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