Array illuminators based on diffractive optical elements

被引：11

作者：

Barge, M ^{[1
]}

Hamam, H ^{[1
]}

Defosse, Y ^{[1
]}

Chevallier, R ^{[1
]}

DelaTocnaye, JLD ^{[1
]}

机构：

[1] ECOLE NATL SUPER TELECOMMUN BRETAGNE, CNRS, URA 1329, DEPT OPT, F-29285 BREST, FRANCE

来源：

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1996年 / 27卷 / 04期

关键词：

array illuminators; diffractive optic; BINARY PHASE GRATINGS; ELECTRON-BEAM LITHOGRAPHY; DAMMANN-GRATINGS; SPOT ARRAYS; KINOFORM STRUCTURES; FRESNEL-TRANSFORM; DIGITAL OPTICS; LASER-BEAM; GENERATION; DESIGN;

D O I：

10.1088/0150-536X/27/4/002

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper is a presentation of array illuminators based on diffractive optical elements. Theses devices are among the most commonly used nowadays. Particular attention is paid to three of them: Dammann gratings and similar elements, Talbot illuminators and lenslet arrays. Although they are very close in terms of design and fabrication, they differ, by the diffraction regimes in which they operate. Therefore, we emphasize this peculiarity which results from the properties of the respective diffraction regimes and we show how the choice of an array illuminator is mainly dependent on the application requirements.

引用

页码：151 / 170

页数：20

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