共 50 条
- [31] MEMS Capacitive Sensor for Wound Monitoring Applications 5TH INTERNATIONAL CONFERENCE ON MECHANICS AND MECHATRONICS RESEARCH (ICMMR 2018), 2018, 417
- [32] Porous silicon: Technology and applications for micromachining and MEMS SMART SENSORS AND MEMS, 2004, 181 : 273 - 288
- [34] MEMS technology for space rate sensor applications GUIDANCE AND CONTROL 2007, 2007, 128 : 535 - +
- [35] Mems technology for optical interconnect and networking applications LEOS 2001: 14TH ANNUAL MEETING OF THE IEEE LASERS & ELECTRO-OPTICS SOCIETY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 732 - 733
- [36] MEMS technology as a contender for the future wireless applications 2001 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOL 1 & 2, PROCEEDINGS, 2001, : 101 - 110
- [37] Microsystems Technology (MST) and MEMS Applications: An Overview MRS Bulletin, 2001, 26 : 312 - 315
- [38] Development of microfabrication technology for MEMS/MOEMS applications MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS II, 2004, 5641 : 179 - 187