MEMS-based angular rate sensors

被引：3
|
作者：
Song, I
Lee, B
机构：
来源：
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年
关键词：
MEMS-based angular rate sensor; gyroscope; commercialization;
D O I：
10.1109/ICSENS.2004.1426250
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The development of MEMS-based angular rate sensors offers revolutionary improvements on low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modest performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realised. This paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to the consumer electronics.
引用
收藏
页码：650 / 653
页数：4
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