Coercivity in SmCo hard magnetic films for MEMS applications

被引：33
|
作者：
Pina, E
Palomares, FJ
García, MA
Cebollada, F
de Hoyos, A
Romero, JJ
Hernando, A
González, JM
机构：
[1] Univ Complutense Madrid, RENFE, Inst Magnetismo Aplicado, Madrid 28230, Spain
[2] CSIC, Inst Ciencia Mat Madrid, E-28049 Madrid, Spain
[3] EUITT UPM, Dept Fis Aplicada Telecomunicac, Madrid 28031, Spain
[4] IMA, Unidad Asociada ICMM, Madrid 28230, Spain
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 290卷
关键词：
magnetic films; coercivity;
D O I：
10.1016/j.jmmm.2004.11.410
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this work we have investigated the thermal dependence of coercivity in 1.5 mu m thick SmCo5 films fabricated by sputtering technique. Samples were deposited onto Si substrates kept at different temperatures. Samples grown below 450 degrees C are amorphous, present low coercivity and require further crystallization processes in order to obtain the 1:5 SmCo hard phase. Samples grown at 450 degrees C are nanocrystalline in the as-deposited state and exhibit high room temperature in-plane coercivity. Correlation between the thermal dependence of coercivity and the nanostructure has been analyzed in the frame of the so-called micromagnetic model. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：1234 / 1236
页数：3
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