Coercivity in SmCo hard magnetic films for MEMS applications

被引：33
|
作者：
Pina, E
Palomares, FJ
García, MA
Cebollada, F
de Hoyos, A
Romero, JJ
Hernando, A
González, JM
机构：
[1] Univ Complutense Madrid, RENFE, Inst Magnetismo Aplicado, Madrid 28230, Spain
[2] CSIC, Inst Ciencia Mat Madrid, E-28049 Madrid, Spain
[3] EUITT UPM, Dept Fis Aplicada Telecomunicac, Madrid 28031, Spain
[4] IMA, Unidad Asociada ICMM, Madrid 28230, Spain
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 290卷
关键词：
magnetic films; coercivity;
D O I：
10.1016/j.jmmm.2004.11.410
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this work we have investigated the thermal dependence of coercivity in 1.5 mu m thick SmCo5 films fabricated by sputtering technique. Samples were deposited onto Si substrates kept at different temperatures. Samples grown below 450 degrees C are amorphous, present low coercivity and require further crystallization processes in order to obtain the 1:5 SmCo hard phase. Samples grown at 450 degrees C are nanocrystalline in the as-deposited state and exhibit high room temperature in-plane coercivity. Correlation between the thermal dependence of coercivity and the nanostructure has been analyzed in the frame of the so-called micromagnetic model. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：1234 / 1236
页数：3
相关论文
共 50 条
  • [1] Electroplating hard magnetic SmCo for magnetic microactuator applications
    Chen, Jue
    Rissing, Lutz
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (07)
  • [2] DC Electrodeposition of Thick SmCo Films for MEMS Applications
    Chouarbi, K.
    Woytasik, M.
    Dufour-Gergam, E.
    Lefeuvre, E.
    Moulin, J.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2012, 159 (10) : D592 - D596
  • [3] Pulsed laser deposition of hard magnetic SmCo films
    Neu, V
    Fähler, S
    Holzapfel, B
    Schultz, L
    RARE EARTH MAGNETS AND THEIR APPLICATIONS, 2002, : 438 - 448
  • [4] Patterned sputter deposited SmCo-films for MEMS applications
    Budde, T
    Gatzen, HH
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2002, 242 : 1146 - 1148
  • [5] Coercivity mechanism in hard magnetic SmCo5/PrCo5 bilayers
    Patra, A. K.
    Fleischhauer, F.
    Oswald, S.
    Schultz, L.
    Neu, V.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2014, 47 (21)
  • [6] Preparation, microstructure and magnetic properties of high-coercivity SmCo/Cr films
    Yan, Ge
    Liu, Xianghua
    Cui, Liya
    Zhou, Shaoxiong
    Zheng, Wu
    Wang, Ailing
    Chen, Jinchang
    Gongneng Cailiao/Journal of Functional Materials, 1999, 30 (03): : 254 - 255
  • [7] Hard Magnetic Materials for MEMS Applications
    Dempsey, Nora M.
    NANOSCALE MAGNETIC MATERIALS AND APPLICATIONS, 2009, : 661 - 683
  • [8] Intrinsic coercivity of SmCo based permanent magnetic films prepared on hot substrates at 650℃
    Li, Yuanxun
    Peng, Long
    Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2015, 44 (04): : 796 - 799
  • [9] Hard magnetic SmCo thin films prepared by pulsed laser deposition
    Neu, V
    Thomas, J
    Fähler, S
    Holzapfel, B
    Schultz, L
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2002, 242 : 1290 - 1293
  • [10] Intrinsic Coercivity of SmCo Based Permanent Magnetic Films Prepared on Hot Substrates at 650 °C
    Li Yuanxun
    Peng Long
    RARE METAL MATERIALS AND ENGINEERING, 2015, 44 (04) : 796 - 799
12345