[1] Shanghai Univ, Sch Automat & Mech Engn, SMIT Ctr, Jiading Campus, Shanghai 201800, Peoples R China
[2] Shanghai Univ, Nanomicro Res Inst, Jiading Campus, Shanghai 201800, Peoples R China
[3] Huangshan Univ, Sch Mech & Elect Engn, Huangshan 245041, Peoples R China
[4] Chalmers Univ Technol, Dept Microtechnol & Nanosci, Elect Mat & Syst Lab, SE-41296 Gothenburg, Sweden
[5] SHT Smart High Tech AB, SE-41133 Gothenburg, Sweden