Closed-loop pressure control of an adaptive single chamber membrane lens with integrated actuation

被引：0

作者：

Draheim, Jan ^{[1
]}

Burger, Tobias ^{[1
]}

Kamberger, Robert ^{[1
]}

Wallrabe, Ulrike ^{[1
]}

机构：

[1] Univ Freiburg, Lab Microactuators, Dept Microsyst Engn IMTEK, D-79106 Freiburg, Germany

来源：

OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2011年

关键词：

component; adaptive lens; control; pressure sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We introduce a closed-loop pressure control of a single chamber adaptive fluidic membrane lens with an integrated piezoelectric bending actuator. For this purpose a pressure sensor is integrated into the lens and allows for a measurement of the chamber pressure as a function of the refractive power. The linear relation between pressure and refractive power allows to eliminate the typical hysteresis effects of piezo actuators.

引用

页码：47 / 48

页数：2

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